Process Optimization for Exfoliation of ?-In?Se? for Acoustic Device Applications
Sultana, Marzia
Sultana, Marzia
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Abstract
RF circulators are critical for full-duplex operation in communication transceivers, yet conventional magnet-based implementations remain difficult to miniaturize and integrate due to their reliance on bulky magnets. Presented are initial efforts to investigate magnet-free acoustic nonreciprocity by leveraging acoustoelectric coupling in a two-dimensional ferroelectric, ?-In?Se?, which exhibits stable room-temperature polarization and strong electron-phonon interaction. Simulations of acoustic gain in ?-In?Se?-based heterostructures were performed and compared with other candidate materials, indicating the strong potential of ?-In?Se? for future acoustic device applications with lower operating voltage at 1 GHz. The first step toward device fabrication is obtaining high-quality monolayers or few-layer flakes from bulk crystals through mechanical exfoliation, a cost-effective and accessible technique for early-stage material studies. However, a systematic exfoliation process for ?-In?Se? remains largely unexplored, making it difficult to consistently obtain high-quality flakes. Preliminary electrical I-V measurements and sheet resistance analysis indicate that the resulting flakes show poor compatibility for device fabrication. This study examines key process parameters affecting exfoliation yield, including pre- and post-exfoliation substrate baking temperature and time. Initial results indicate that increasing the substrate baking temperature from 150�C to 200�C leads to significant improvements in flake uniformity and lateral size. A Design of Experiments methodology will be applied to optimize processing conditions and maximize the yield of flakes suitable for acoustic device fabrication.
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Date
1/1/2026
Student Status
Graduate Student
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Poster
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Electrical Engineering
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College of Engineering and Mathematical Sciences
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Engineering